Laser Ablation Inductively Coupled Plasma Mass Spectrometry identifies the elemental composition of materials with the sensitivity to quantify trace elements in low parts per billion to parts per trillion. Solid particles are ablated from the original sample by use of a high-powered Neodymium-YAG laser and transported to an RF induced Argon plasma for ionization. The newly formed ions are then introduced into a mass spectrometer for identification and quantization. The end result is unparalleled accuracy and precision with a wide spectrum of effective applications. With Laser Ablation/ICP/MS, ORS offers a unique approach to elemental data analysis that can be used to determine sample composition, and possible contamination identification, for the ever-changing microelectronics and metallurgical industries.

The advantage of ICP/MS with Laser Ablation is that it offers in situ analysis of solid samples and demands little to no sample preparation. This results in a very low risk of foreign contamination and allows small-scale samples to be quantified. Both conductive and non-conductive materials can be ablated without the need for a conductive coating or sample dissolution, and no vacuum is required either during the sampling or ionization steps. Samples can be taken directly from the original specimen, at multiple locations, with only superficial damage done to the surface. This is ideal for small feature analysis of complex structures or modules, where lateral spatial resolution is essential. LA/ICP/MS can be used as a complimentary analysis technique to FT-IR, GC/MS, and/or EDX, when high resolution quantification data and multi-source data correlation are necessary.

Capabilities:

Advantages:

Industries:

Applications:

Instrumentation:

Micromass Platform ICP

As the push for the European RoHS initiative grows to include the microelectronic industry on a global scale, ORS and its industry experts can also help ensure that RoHS compliance is obtained.