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mail to:dadelluomo@ors-labs.com

mail to:dadelluomo@ors-labs.com

Residual Gas Analysis RGA Internal Vapor Analysis IVA

Internal Vapor Analysis (IVATM ) Services

Specialized Applications in Qualitative and Quantitative Low Molecular Weight Gas Mass Spectrometry of Hermetic Packages

Oneida Research Services, Inc. (ORS) specializes in Internal Vapor Analysis (IVA™) services to quantitatively measure the primary and trace gases inside hermetic components. The gas content inside sealed components, particularly moisture concentration, can cause long term reliability problems such as corrosion, fogging, leakage, current bit errors and lubrication issues. Known to some as Residual Gas Analysis (RGA) or "Mil-Std 1018", the test measures the primary sealing gases and trace gases. It is ideally suited for process development, sealing quality control, studying long term out-gassing of the enclosed materials inside the components, and for product qualification.

Applications apply to a wide range of industries including Microelectronics, Large Hermetic Modules, Metals, Ceramics, Telecommunications, Food, Medical Devices, Pharmaceutical, Packaging and Illumination.

IVA has been a core technology of ORS for almost 30 years. We have Suitability status from the Defense Supply Center Columbus (DSCC) for qualifying military devices according to Mil-Std-883 TM-1018 and Mil-Std-750 TM 1018. For commercial applications, we conduct the test per our Commercial Practice Test Method SOP-1053. Our DSCC Suitability status is intended for the qualification of military devices and we are prohibited from changing any test parameters described within the method. However, there are many instances where the test parameters used for military applications is inappropriate for commercial product or process development studies (e.g. sample test temperature and sample pre-bake requirements).

Our Commercial Practice Test Method MEL-1053 exceeds the instrument and calibration requirements of the Military Standards. The ORS commercial practice test method represents best practices for R&D and process monitoring applications.

Analysis of samples larger than 0.01 cc internal cavity size is performed on our IVA™ 110-s quadrupole mass spectrometer system.

ORS has recently introduced our HR-IVA™ high resolution Time-of-Flight mass spectrometer system for measuring samples with an internal free volume cavity as small as 1nl (1X10-6cc).

Both systems were designed and manufactured by ORS. Please view our IVA™ Instrument Sales web page for more information on acquiring this technology for use in your facility.

In parallel with Internal Vapor Analysis, ORS offers additional analytical techniques for the Qualification and process development of Adhesives used in passive or active components. Outgassing of solvents, extenders, or reaction by-products and their deposition on critical surfaces can be a reliability concern. Residual outgassing products can be monitored and quantified by the following methods: Internal Vapor Analysis, Static or dynamic headspace analysis by GC/MS, and Direct Insertion Probe/MS.

Test Methods

MEL-1053: Internal Vapor Analysis - Commercial Practice
This test procedure is used for testing hermetic devices in accordance with ORS’ Commercial Practice for Internal Vapor Analysis (add link). This test method extends the scope and capabilities of traditional Mil-Std-883 or 750, method 1018 analysis. It permits variations to the procedure and/or device test conditions to achieve the best test conditions for specific client applications. Client specific protocols may be established for maximum accuracy and sensitivity for product monitoring applications, process development, R&D, materials evaluations and failure analysis projects. The data is not subject to inclusion in the annual retention report to DSCC and all records regarding these tests are confidential.

MEL-1018: Internal Water Vapor Content - DSCC Suitability for Military Devices
This test procedure is used exclusively for testing hermetic devices in accordance with Mil-Std-883 or 750, method 1018, procedure 1 per the conditions of “Suitability” status granted by the Defense Supply Center Columbus (DSCC). No variations are permitted to this procedure or to the device test conditions. Furthermore, all tests performed per this procedure are subject to inclusion in the annual retention report to DSCC and all records regarding these tests are subject to audit and inspection by the U.S. Government.

Current DSCC Suitability Letter

MEL-1070: Gas Cylinder Analysis of Sealing Chamber Atmospheres
This test method quantitatively measures the process sealing gases sampled from sealing chambers and/or gas supply lines using a specially prepared sampling cylinder. Sampling procedures are described in the instructions provided with the sampling cylinders. Contact ORS for availability and rental of sampling cylinders.

MEL-1080: Identification of UNKNOWN volatile organic compounds by IVA/GC/MS
This test method is used to identify unknown volatile compounds that may be detected by IVA test methods but may not be conclusively identified due to the complexity or trace quantity of the mass spectra. Standard hermetic devices, gas cylinders or individual materials sealed in glass ampules may be analyzed. The technique is useful to understand the trace contaminants, chemical processes of material outgassing and chemical reactions from environmental stress.

The Sample
° Microelectronic Components and Multi-Chip Modules
° Fiber-Optic Devices and Sensors
° Light Bulbs, Lamps and Ampoules
° Pacemakers and other Medical devices
° Large-Scale Electronic Devices and Units
° Gas Collection Bottles and Cylinders
  (see gas cylinder rental)
° Vials Containing Bulk Material in a Dry Nitrogen Atmosphere
° Voids and Blisters in Processed Metals,
   Ceramics and Plastics
° Syringes Containing Extracted Gases
° Aerosols
° Mylar Bags and Other Hermetic Packaging
° MEMS Devices

The Test Conditions
° Time/Temperature Preconditioning
° Variable Test Temperature
° Adjustable AMU Scan Range and Speed
° Variable Data Acquisition Time
° Flexibility in Sample Puncture Location

The Format of Results
° Qualitative Results
° Quantitative Results
° Spectra Report (AMU vs. Intensity)
° ID of Unknowns through the NIST Mass Spectrometry Database
° Pumpout Curves for all Gases Identified

Test Capabilities
A versatile set of test capabilities allows us to accommodate a wide variety of samples. This versatility alone makes Gas Analysis a unique problem-solving tool in any environment. ORS test capabilities include :
° The ability to test samples with an internal volume of 1nl (1X10-6cc) and up (including IVA and HR-IVA)
° An accuracy of less than ±5%
° A sensitivity of 10 ppmv or better
° An applied Atomic Mass Unit (AMU) range of 1 to 512
° Access to a Mass Spectrometer Data Base with over 100,000 - 140,000
   spectra for assistance in the identification of unknown compounds
° Flexibility in sample holding temperature during analysis
° Flexibility in test protocol

Gas Analysis Services Customized to Fit Your Needs
Our experienced technical and sales staff will be happy to discuss your specific application in detail with you and recommend a test plan that will fit your individual needs. To submit samples for gas analysis, simply print out our IVA™ Sample Submission Form, enter in the appropriate information and mail the samples and submission form to ORS.

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