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About... High Resolution Internal Vapor Analyzer (HR-IVA™) Services...
ORS Inc. is pleased to announce the unveiling of its
new HR-IVA™ Analyzer for
testing cavity gases in very small volume packages. This new technology provides
tremendous
sensitivity to package volumes < 0.01cc compared to standard Quadrupole
techniques which are applicable to samples
larger than 0.01 cc..
In a three (3) year development program to address industry trends to manufacture
smaller and smaller devices,
ORS has developed innovative calibration and testing
technology for measuring small volume devices. We developed
all metal seals calibrator
technology that allows us to calibrate the system at volumes ranging from 0.01cc down
to
1nl (1X10-6cc). ORS developed a high speed, high mass resolution, and highly sensitive
Time-Of-Flight (TOF) spectrometer
to test the tiniest of devices with significant
advancement in signal-to-noise.
HR-IVA™ System Specifications:
° Spectra Acquisition speed: 1 full spectra every 20 µs.
° Mass Range: mass 2 to 150 standard (2-500 capable)
° Mass resolution: 0.1 AMU
° Calibration Fixtures: 0.0001, 0.0005, 0.001, 0.005 and 0.01 cc
° Single sample mounting procedure
° Sample temperature: 100°C standard (room temperature to 150°C capable)
° Sample internal free volume: 1nl(1X10-6cc) to infinite volume.
TOF Design:
The sample gas from the device passes through a small transfer passage into the ion
source.
As the sample gas passes by, ions of the gas are created. Every 20 µs, a packet
of ions are extracted into the TOF
by a high voltage pulse. The ions then traverse the flight
path to the ion count detector. The time that it takes
each ion to reach the detector is
related to the mass-to-charge ratio. Ions reaching the detector are counted and
saved in
the PC at a 2 GHz sampling rate.
Mass Resolution of the TOF:
Mass 14 from nitrogen, mass 16 from oxygen, mass 17 and 18 from water.
Calibration curve:
Moisture in nitrogen in a 0.0005 cc calibrator.
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