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TECHNICAL
PAPERS
ORS
Commercial Practice for IVA™ (440kb)
The purpose of this test method is to quantitatively
measure the relative concentration of the internal vapor
content, including water vapor, in gas filled hermetically
sealed devices using a mass spectrometry technique....
Interpretation
of RGA Data (164kb)
Residual Gas Analysis of hermetic microelectronic devices
has traditionally been treated as a means for measuring
a device's internal moisture content only. Too many
times, the moisture reading is treated on a pass/fail
basis using the MIL-STD criteria that all devices must
contain less than 5000 parts per million by volume (ppmv)
of moisture. In reality, the other gases routinely reported
with the moisture contain a wealth of information that
can be used to significantly improve product quality
and reliability....
Hermetic
Package Leak Testing Re-visited (766kb)
The two main reasons to seal devices hermetically, thereby preventing hermetic enclosure ambient compromise (HEAC), are: (1)
operating characteristics that require protection from condensed, adsorbed, or gaseous water that can cause corrosion, electrical
leakage, fogging, stiction, or related fail modes, and (2) to maintain reduced-pressure ambients during the product’s expected
storage and operating lifetime.
Measuring mass flows in hermetically sealed MEMs & MOEMs to ensure device reliability (2.7mb)
Many MEMs and MOEMs devices require controlled ambient environments for successful operation. Controlled ambients are
usually obtained via hermetic packaging. These controlled environments must first be obtained and then maintained to
prevent their degradation over the device lifetime. Controlled ambients decay in quality over time due to
various mechanisms including leaks, permeation,....
Counterfeit Electronic Components (80kb)
These are just a few examples of the worldwide proliferation of counterfeit electronic components. From five to twenty
percent of electronic components in distributors’ supply chains are probably counterfeit. Counterfeits cost industry up to
$100B per year....
The
Effects of Hydrogen On Device Reliability (452kb)
The potentially detrimental effects of outgassed hydrogen
on device reliability have been substantiated in the
trade press over the past several years. Non-specific
to silicon or gallium arsenide technology, it's negative
impact is universal and can range from hydride formation
with ensuing material deformation to oxide reduction
followed by moisture related failure mechanisms....
Single Sample Cylinder for RGA Correlation (114kb)
A large portion the manufacturers of high reliability microelectronic devices must have those devices tested
to be proven “dry”. A mass spectrographic technique, referred to as Residual Gas Analysis (RGA) has been
the primary means of demonstrating that the devices contain less than the 5000 parts per million(ppm) of
moisture.
Outgassing
Species in Optoelectronic Packages (32kb)
The microelectronics community has been plagued with
the problem of moisture formation and outgassing of
various fixed and organic gaseous species into the device
cavity. It is now very apparent that the optoelectronic
packaging community is having the same problems only
made more complex by the use of inadequate test methods,
unproven materials and misconceptions in the supply
and user industries. A test protocol is provided that
addresses these issues, which allows the optoelectronic
community to improve device quality and reliability....
Moisture
Ingress and Absorption in a CCD Package (184kb)
Moisture ingress in electronic packages can lead to
catastrophic failures due to electromigration and corrosion.
For space application, epoxy sealed CCDs are often used,
and the risk due to moisture ingress during test and
storage rarely assessed....
Material Outgassing Characterization (52kb)
The Material Outgassing Characterization test developed at ORS is a qualitative and quantitative analysis of the gaseous substances
desorbed from a material after thermal stress. The analysis measures the relative volumetric concentrations of volatile....
Analyzing the Contamination in Electronic Packages: Internal Vapor Analysis (80kb)
Internal Vapor Analysis is a complete quantitative analysis of the ambient gases contained within the hermetic cavity of
microelectronic devices. The ORS IVA test is performed in accordance with ORS SOP MEL-1053 (an enhanced method from
Mil-Std-883, Method 1018, Procedure 1, "Internal Water Vapor Content"), for hermetic cavity from 0.01cc and up ...
IVA Test Sequence (74kb)
The most widely accepted method for evaluating internal gas content is Internal Vapor Analysis (IVA) via mass spectrometry. The mass
spectrometric method for IVA involves the ionization and separation of gas molecules as they flow from the package cavity ...
Package
Hermeticity and Gas Analysis (4.89mb)
Failure mechanisms identified in microelectronic devices
are, to a large degree, triggered by excessive moisture
in the package cavity. Results vary from a subtle electrical
leakage to severe corrosion and electrical failure.
Although this internal water vapor may be sealed in
the package during processing or may be generated internally
after seal from material outgassing or decomposition,...
Failure
Analysis of a Hybrid Device
Exhibiting Copper Dendrite Growth on Thick Film Resistors (7.25mb)
The analysis was initiated because of electrical testing
failures - a voltage divider exhibited an out-of-specification
value during burn-in at elevated temperature. This voltage
divider compared the outputs of two thick film resistors.
Failure
Analysis of Die Bond Adhesion Failures Caused by Silicone
Contamination (5.94mb)
This paper presents a case history of a failure analysis
performed on die bond adhesion failures. Silicone contamination
caused intermittent adhesive failures at the die back
metallization/conductive epoxy interface....
Metal
Migration Failures in a Hybrid Device:
Interaction of Package Materials, Process Residuals,
and Ambient Gases (4.82mb)
This paper presents the case history of a failure analysis
performed on hybrid devices that exhibited electrical
failures during thermal cycle with bias. Electrical
testing revealed resistive shorts between Vcc and ground
bond pads on integrated circuits within the package...
Moisture Analysis: History, Sampling and Case Study (156kb)
Mass Spectrometry analysis of electronic componets is more than Internal Water Vapor test as the titles of the
Military Standards 883 and 750 might imply. The test provides a quantitative measurement of all gasses inside
a device, and should be used as such.
SPECTRACAM™
- Random Access Charge Injection Device Cameras for Spectroscopy (104kb)
We designed, built, and tested the SpectraCAM84/86, a family of scientific Random Access Charge Injection
Device (RACID) cameras for analytical spectroscopy and quantitative imaging.
The cameras feature the RACID84/86 imagers, which are CMOS CID image sensors
with true random pixel selection, integration, and readout. We developed CMOS CID technology in order to
integrate high transparency RACID pixel arrays with CMOS on-chip camera circuitry. Pixels are
27-micron x 27-micron square.
IVA™ INSTRUMENT SALES
Perform
Package Moisture and Gas Analysis at Your Facility (156kb)
The IVA™ system is specifically designed for quantitative
analysis of low molecular weight gases contained in
hermetic packages, cavities and other enclosures....
MISCELLANEOUS
Moisture
Conversion Software
A quick Moisture Conversion Software to easily convert
between absolute (ppmv or %v), relative humidity (%RH)
and dew/frost point (°C).
(Note: Contact ORS for Further Information.)
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